"ANEST IWATA"
OIL FREE SCROLL VACUUM PUMP
ORIGINAL DESIGN
OIL FREE SCROLL VACUUM PUMP ORIGINAL DESIGN
Model
ISP-90 , ISP-250B , ISP500B
Displacement
L/min(50/60Hz)
90 / 108 to 500/600 L/min(50/60Hz)
Ultimate pressure
Pa {Torr}
5 {3.8×10-2} to 1.0 {7.5×10-3}
Voltage
V
Single phase 100,115 / 200,230
Three phase 200,208,230 / 380,415,460
Features;-
• As ISP vacuum pumps do not contain lubricating oil or sealing water resulting in no
back-migration of fluid, it ensures clean vacuum.
• It is light-weight and occupies minimum space because of original design called double
wrap scroll.
• While orbiting scroll makes one turn, the process of suction, compression and exhaust
proceeds continuously,
resulting in a minimum pulsation which provides less vibration
and low noise.
• Due to double wrap scroll design which is dynamically stable, ISP vacuum pumps can
deal with a wide range
of applications ranging from atmospheric pressure to the
ultimate pressure. There is little power variance
between atmospheric pressure and
the ultimate pressure, which allows repeated continuous operation between
atmospheric pressure and vacuum.
• The Air Flush device has been added as a standard feature. Shaft seal configuration
has also improved. Due to the Air Flush and the new shaft seal system, reliability and
maintenance interval as well as evacuating
performance of water vapor and small
particles have been now remarkably improved.
Applications;-
- Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
- Surface modification, Electron beam process
- Gas recovery devices
- Vacuum equipment
- Leak detectors
- Device handling system
- Accelerator, Synchrotron Radiation
- Vacuum furnace, Heat treatment furnace
- Laboratory use
- Vacuum packaging machine
- Others Evacuating gases This pumping system is suitable for clean processes only.
Do not use explosive, flammable, toxic or corrosive substances or substances which
contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance
work on pumps which have used hazardous substances. Ambient Temperature
Use at ambient operation temperature in the range of 5°C to 40°C.
DVSL-500B Specifications
Model
DVSL-500B
DVSL-501B
Displacement
L/min(50/60Hz)
430 / 520
Ultimate pressure
Pa {Torr}
10 {7.5×10-2}
30 {2.2×10-1}
Motor power
kW (50/60Hz)
0.9 / 1.1
Voltage V
Three phase
200,208,230 / 380,415,460
Features;-
As DVSL vacuum pumps do not contain lubricating oil or sealing water and no bearings through gas path, it ensures clean vacuum and no oil mist. The Air Flush device has been added as a standard feature as well as the original dry
vacuum system. Reliability and maintenance interval as well as evacuating performance of water vapor and small particles have been now remarkably improved. Applications:- Vacuum Forming Vacuum Drying only for water based
Deairator Ceramic Industry
Vacuum Chuck Gas Substitution
Regeneration Pumping for Electron Tube
Vacuum Cooling
Precaution on Usages;-
Evacuating gases
• This pumping system is suitable for clean processes only.
• Do not use explosive, flammable, toxic or corrosive substances or substances which
contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance
work on pumps which have used hazardous substances. Ambient Temperature
Use at ambient operation temperature in the range of 5°C to 40°C.
VTC-050
VTC-050
The pictures show VTC-050. Chamber, vacuum gauge, and leak valve are optional.
Specifications;-
Model
VTC-050
VTC-150
VTU-050
VTU-500
Flange size
Inlet
ICF114
ICF152
ICF114
ICF203
Outlet
NW16
NW16
NW16
NW25
TMP pumping speed
N2
L/s
50
190
50
550
H2
L/s
40
160
40
500
Ultimate pressure
Pa
10-6(No baking)
Features;-
Clean Discharge and Vacuum
This high vacuum pumping system is completely dry system because it consists
of oil-free scroll vacuum pump (ISP) and turbo molecular pump (TMP). Compact Design Since this pumping system is compact design and footprint is minimized, it can be
installed near your vacuum system. It is easy to move. Handling
Its controller has two ways to start to run TMP, manually or automatically*. It can be
chosen by the application and preference.
* In the case of automatic start, it is restricted by volume of chamber and pipes.
Option
Turbo Molecular Pump
If you have any preference of TMP, it could be chosen. Ask for TMP and installation direction of TMP. Others
Ask for chamber, vacuum gauge and automatic valve because they are optional.
